AFM-IR device compatible with 8-inch (200 mm) wafers
This is a large sample-compatible model that allows for AFM-IR measurements to be conducted by placing an 8-inch (200mm) wafer directly onto the sample stage.
In addition to high spatial resolution chemical imaging, it also supports nanoscale IR spectroscopy for nano foreign substance analysis. It is compatible with the IR library as well. It supports not only 8-inch wafers but also 152mm photomask samples.
- Company：日本レーザー
- Price：Other
